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Microsystem Technology and Microrobotics

E-BookPDF1 - PDF WatermarkE-Book
408 Seiten
Englisch
Springer Berlin Heidelbergerschienen am17.04.20131997
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.mehr
Verfügbare Formate
BuchGebunden
EUR160,49
BuchKartoniert, Paperback
EUR160,49
E-BookPDF1 - PDF WatermarkE-Book
EUR149,79

Produkt

KlappentextMicrosystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Details
Weitere ISBN/GTIN9783662034507
ProduktartE-Book
EinbandartE-Book
FormatPDF
Format Hinweis1 - PDF Watermark
FormatE107
Erscheinungsjahr2013
Erscheinungsdatum17.04.2013
Auflage1997
Seiten408 Seiten
SpracheEnglisch
IllustrationenXII, 408 p.
Artikel-Nr.7105466
Rubriken
Genre9200

Inhalt/Kritik

Inhaltsverzeichnis
1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.mehr