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Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes

BuchGebunden
332 Seiten
Englisch
Springer Netherlandserschienen am23.06.20161st ed. 2016
This book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD).mehr
Verfügbare Formate
BuchGebunden
EUR125,99
BuchKartoniert, Paperback
EUR106,99
E-BookPDF1 - PDF WatermarkE-Book
EUR96,29

Produkt

KlappentextThis book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD).
Zusammenfassung
Provides a unique new insight into charged nanoparticles

Covers the new field of non-classical crystallization

Written by one of the leaders in the field

Includes supplementary material: sn.pub/extras
Details
ISBN/GTIN978-94-017-7614-1
ProduktartBuch
EinbandartGebunden
Erscheinungsjahr2016
Erscheinungsdatum23.06.2016
Auflage1st ed. 2016
ReiheSpringer Series in Surface Sciences
Seiten332 Seiten
SpracheEnglisch
Gewicht702 g
IllustrationenXII, 332 p. 229 illus., 64 illus. in color.
Artikel-Nr.37684492

Inhalt/Kritik

Inhaltsverzeichnis
1 Non-Classical Crystallization.- 2 Thermodynamics of Physical and Chemical Vapour Deposition.- 3 Nucleation.- 4 Growth.- 5 Diamond Synthesis at Low Pressure.- 6 Growth Mechanism of CVD Diamond.- 7 Growth Mechanism of CVD Silicon.- 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures.- 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser.- 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure.- 11 Deposition Behavior of Charged Nanoparticles.- 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles.- 13 Charge-Enhanced Kinetics.- 14 Implications and Applications.mehr

Schlagworte

Autor

Prof. Hwang's research interest is in the microstructure evolutions during material processing, especially, abnormal grain growth and thin film growth. The topics are approached both experimentally and theoretically, occasionally using computer simulation. The most focused work has been the theory of charged clusters, which is suggested as a new understanding of thin film growth. This topic is related to the growth mechanism of thin films and nanowires, nanotubes prepared by chemical vapor deposition. The size distribution of charged clusters or nanoparticles is measured by differential mobility analyzer (DMA). He published more than 100 papers in SCI-indexed journals
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Hwang, Nong Moon